The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2024
Filed:
Jan. 19, 2021
Applicant:
Japan Science and Technology Agency, Kawaguchi, JP;
Inventors:
Hideo Hosono, Meguro-ku, JP;
Yoshitake Toda, Meguro-ku, JP;
Satoru Watanabe, Chiyoda-ku, JP;
Toshinari Watanabe, Chiyoda-ku, JP;
Kazuhiro Ito, Chiyoda-ku, JP;
Naomichi Miyakawa, Chiyoda-ku, JP;
Nobuhiro Nakamura, Chiyoda-ku, JP;
Assignee:
JAPAN SCIENCE AND TECHNOLOGY AGENCY, Kawaguchi, JP;
Primary Examiner:
Int. Cl.
CPC ...
H10K 30/15 (2023.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); H01L 21/02 (2006.01); H01J 37/34 (2006.01); H01L 31/032 (2006.01); H10K 50/16 (2023.01); H10K 50/18 (2023.01); H10K 50/17 (2023.01); H10K 102/00 (2023.01); H10K 102/10 (2023.01); H01L 31/0256 (2006.01);
U.S. Cl.
CPC ...
H10K 30/152 (2023.02); C23C 14/08 (2013.01); C23C 14/086 (2013.01); C23C 14/3407 (2013.01); C23C 14/3414 (2013.01); C23C 14/352 (2013.01); H01J 37/3429 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01); H01L 31/0324 (2013.01); H01L 2031/0344 (2013.01); H10K 50/16 (2023.02); H10K 50/171 (2023.02); H10K 50/18 (2023.02); H10K 2102/00 (2023.02); H10K 2102/102 (2023.02); Y02E 10/549 (2013.01); Y02P 70/50 (2015.11);
Abstract
A thin film of metal oxide includes zinc (Zn); tin (Sn); silicon (Si); and oxygen (O). In terms of oxide, based on 100 mol % of total of oxides of the thin film, SnOis greater than 15 mol % but less than or equal to 95 mol %.