The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2024
Filed:
Apr. 26, 2020
Euv Labs, Ltd, Moscow, RU;
Aleksandr Yurievich Vinokhodov, Troitsk Moscow, RU;
Vladimir Vitalievich Ivanov, Moscow, RU;
Konstantin Nikolaevich Koshelev, Troitsk Moscow, RU;
Mikhail Sergeyevich Krivokorytov, Moscow, RU;
Vladimir Mikhailovich Krivtsun, Troitsk Moscow, RU;
Aleksandr Andreevich Lash, Moscow, RU;
Vyacheslav Valerievich Medvedev, Troitsk Moscow, RU;
Yury Viktorovich Sidelnikov, Troitsk Moscow, RU;
Oleg Feliksovich Yakushev, Moscow Region Korolyev, RU;
Denis Alexandrovich Glushkov, Nieuwegein, NL;
Samir Ellwi, Crawley, GB;
Oleg Borisovich Khristoforov, Moscow, RU;
ISTEQ B.V., Eindhoven, NL;
ISTEQ GROUP HOLDING B.V., Eindhoven, NL;
Abstract
An X-ray beam is generated in an interaction zone of an electron beam and a target, the zone being an annular layer of a molten fusible metal in an annular channel of a rotating anode assembly. The channel has a surface profile which prevents slopping of the molten metal in the radial direction and in both directions along the rotation axis. The liquid-metal target forms a circular cylindrical surface due to the centrifugal force acting thereupon. The linear velocity of the target is preferably higher than 80 m/s; in a vacuum chamber, a changeable membrane made of carbon nanotubes is installed in the X-ray beam path and a protective screen with apertures for electron beam entry and X-ray beam exit is arranged around the interaction zone. The technical result consists in an X-ray source with increased power, brightness, lifetime and ease of use.