The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2024
Filed:
Jun. 22, 2021
Flusso Limited, Cambridgeshire, GB;
Syed Zeeshan Ali, Cambridgeshire, GB;
Cerdin Ching Ching Lee, Cambridgeshire, GB;
Ethan Gardner, Warwickshire, GB;
Jonathan Owen Hardie, Cambridgeshire, GB;
Jonathan Sean Callan, Cambridgeshire, GB;
Florin Udrea, Cambridgeshire, GB;
Flusso Limited, Cambridge, GB;
Abstract
A fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising: a semiconductor substrate comprising a first etched portion and a second etched portion; a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, and a second dielectric membrane located over the second etched portion of the semiconductor substrate; two temperature sensing elements on or within the first dielectric membrane and two temperature sensing elements on or within the second dielectric membrane; an output circuit configured to measure a differential signal between the two temperature sensing elements of the first dielectric membrane and the two temperature sensing elements of the second dielectric membrane; wherein the first dielectric membrane is exposed to the fluid and the second dielectric membrane is isolated from the fluid.