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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11867643 B1

PDFFull Text
Date of Patent:
Jan. 09, 2024

Filed:

Apr. 15, 2019

Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried

Applicant:

Korea Research Institute of Standards and Science, Daejeon, KR;

Inventors:

Hyo Chang Lee, Sejong-si, KR;

Jung Hyung Kim, Daejeon, KR;

Dae Jin Seong, Gongju-si, KR;

Hee Jung Yeom, Daejeon, KR;

Assignee:

KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE, Daejeon, KR;

Attorney:

STIP Law Group, LLC

Primary Examiner:

Dominic E Hawkins

Int. Cl.
CPC ...
G01N 22/00 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01Q 1/24 (2006.01); H01Q 1/52 (2006.01); H01Q 9/02 (2006.01); H01Q 21/00 (2006.01); H01Q 21/06 (2006.01);
U.S. Cl.
CPC ...
G01N 22/00 (2013.01); H01J 37/3222 (2013.01); H01J 37/32715 (2013.01); H01J 37/32935 (2013.01); H01L 21/6833 (2013.01); H01Q 1/24 (2013.01); H01Q 1/523 (2013.01); H01Q 1/525 (2013.01); H01Q 9/02 (2013.01); H01Q 21/0031 (2013.01); H01Q 21/065 (2013.01); H01J 2237/2007 (2013.01);
Abstract

The present invention relates to a planar-type plasma diagnosis apparatus comprising: a transmission antenna for applying a frequency-variable microwave to plasma; a reception antenna for receiving the microwave from the plasma; and a body part encompassing the transmission antenna and the reception antenna so that same are insulated from each other, wherein the upper surface of the transmission antenna for applying the microwave and the upper surface of the reception antenna for receiving the microwave are planar, and side surfaces of the upper surfaces of the transmission antenna and the reception antenna face each other.

Find Patent Forward Citations

Lee, Hyo. (2024). Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried (U.S. Patent No. 11867643). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11867643

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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