The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2024
Filed:
Feb. 24, 2022
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Damiano Milani, Fontanella, IT;
Luca Coronato, Corsico, IT;
Assignee:
InvenSense, Inc., San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5762 (2012.01); G01C 19/5712 (2012.01); B81B 3/00 (2006.01); G01C 19/5733 (2012.01); G01C 19/5769 (2012.01); G01C 19/5726 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5762 (2013.01); B81B 3/0021 (2013.01); G01C 19/5712 (2013.01); G01C 19/5726 (2013.01); G01C 19/5733 (2013.01); G01C 19/5769 (2013.01); B81B 2201/0242 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/04 (2013.01); B81B 2207/012 (2013.01);
Abstract
A MEMS gyroscope includes a driven mass that moves in response to a drive force. A drive amplitude sense electrode is included as a feature of the drive mass and extends in a direction perpendicular to the drive direction. A change in capacitance is measured based on the relative location of the drive amplitude sense electrode to a known fixed position, which in turn is used to accurately determine a location of the driven mass.