The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2024
Filed:
Sep. 09, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Thomas Knisley, Livonia, MI (US);
Mark Saly, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 5/00 (2006.01); C09D 1/00 (2006.01); C23C 16/455 (2006.01); C23C 16/18 (2006.01); C23C 16/32 (2006.01); C23C 16/44 (2006.01); C23C 16/38 (2006.01); C23C 16/30 (2006.01); C23C 16/40 (2006.01); C23C 16/34 (2006.01); C23C 16/42 (2006.01); C23C 16/36 (2006.01); C08F 4/54 (2006.01); C08F 136/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C07F 5/003 (2013.01); C08F 4/545 (2013.01); C09D 1/00 (2013.01); C23C 16/18 (2013.01); C23C 16/308 (2013.01); C23C 16/32 (2013.01); C23C 16/34 (2013.01); C23C 16/36 (2013.01); C23C 16/38 (2013.01); C23C 16/40 (2013.01); C23C 16/42 (2013.01); C23C 16/4408 (2013.01); C08F 136/02 (2013.01);
Abstract
Described are lanthanide-containing metal coordination complexes which may be used as precursors in thin film depositions, e.g., atomic layer deposition processes. More specifically, described are homoleptic lanthanide-aminoalkoxide metal coordination complexes, lanthanide-carbohydrazide metal coordination complexes, and lanthanide-diazadiene metal coordination complexes. Additionally, methods for depositing lanthanide-containing films through an atomic layer deposition process are described.