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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11864465 B1

PDFFull Text
Date of Patent:
Jan. 02, 2024

Filed:

May. 22, 2020

Integration of semiconductor membranes with piezoelectric substrates

Applicants:

Wisconsin Alumni Research Foundation, Madison, WI (US);

University of Hamburg, Hamburg, DE;

Inventors:

Max G. Lagally, Madison, WI (US);

Abhishek Bhat, Fremont, CA (US);

Frank Steele Flack, Madison, WI (US);

Shelley Ann Scott, Madison, WI (US);

Robert H. Blick, Hamburg, DE;

Assignee:

Wisconsin Alumni Research Foundation, Madison, WI (US);

Attorney:

Bell & Manning, LLC

Primary Examiner:

Jarrett J Stark

Int. Cl.
CPC ...
H01L 41/312 (2013.01); H10N 30/072 (2023.01); H10N 30/20 (2023.01); H10N 30/80 (2023.01); H10N 30/87 (2023.01); H10N 30/853 (2023.01);
U.S. Cl.
CPC ...
H10N 30/072 (2023.02); H10N 30/206 (2023.02); H10N 30/802 (2023.02); H10N 30/8554 (2023.02); H10N 30/875 (2023.02);
Abstract

Piezoelectrically actuated devices constructed from thin semiconductor membranes bonded directly to piezoelectric substrates are provided. Methods for fabricating these devices are also provided. The bonding of the semiconductor to the piezoelectric material does not require the use of any intermediate layers, such as bonding agents.

Find Patent Forward Citations

Lagally, Max. (2024). Integration of semiconductor membranes with piezoelectric substrates (U.S. Patent No. 11864465). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11864465

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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