The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Sep. 05, 2018
Applicant:
Plansee SE, Reutte, AT;
Inventors:
Enrico Franzke, Reutte, AT;
Harald Koestenbauer, Reutte, AT;
Joerg Winkler, Reutte, AT;
Dominik Lorenz, Reutte, AT;
Thomas Leiter, Reutte, AT;
Assignee:
Plansee SE, Reutte, AT;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/08 (2006.01); C04B 35/495 (2006.01); C04B 35/645 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); C04B 35/495 (2013.01); C04B 35/645 (2013.01); C04B 35/6455 (2013.01); C23C 14/083 (2013.01); C23C 14/3414 (2013.01); C23C 14/3485 (2013.01); H01J 37/3426 (2013.01); C04B 2235/3251 (2013.01); C04B 2235/3256 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/604 (2013.01); C04B 2235/666 (2013.01);
Abstract
An electrically conductive, oxidic target material includes a proportion of substoichiometric molybdenum oxide phases of at least 60% by volume, an MoOphase in a proportion of 2-20% by volume, and optionally an MoOphase in a proportion of 0-20% by volume. The substoichiometric molybdenum oxide phase proportion is formed by one or more substoichiometric MoO-y phase(s), where y is in each case in a range from 0.05 to 0.25. A process for producing the target material and a process for using the target material are also provided.