The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Sep. 16, 2021
Applicant:

Coventor, Inc., Cary, NC (US);

Inventors:

William J. Egan, Framingham, MA (US);

Kenneth B. Greiner, Arlington, MA (US);

David M. Fried, South Salem, NY (US);

Anshuman Kunwar, Jamaica Plain, MA (US);

Assignee:

Coventor, Inc., Cary, NC (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/398 (2020.01); G06F 3/04815 (2022.01); G06T 19/20 (2011.01); G06F 3/04847 (2022.01); G06F 111/10 (2020.01);
U.S. Cl.
CPC ...
G06F 30/398 (2020.01); G06F 3/04815 (2013.01); G06F 3/04847 (2013.01); G06T 19/20 (2013.01); G06F 2111/10 (2020.01); G06T 2200/16 (2013.01); G06T 2219/2004 (2013.01);
Abstract

A virtual fabrication environment for semiconductor device fabrication that includes an analytics module for performing key parameter identification, process model calibration and variability analysis is discussed.


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