The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Sep. 16, 2021
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Cristian Nagel, Reutlingen, DE;

Johannes Classen, Reutlingen, DE;

Lars Tebje, Reutlingen, DE;

Rolf Scheben, Reutlingen, DE;

Rudy Eid, Stuttgart, DE;

Assignee:

ROBERT BOSCH GMBH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 15/125 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); B81B 3/001 (2013.01); B81B 3/0051 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/04 (2013.01); G01P 2015/0831 (2013.01); G01P 2015/0862 (2013.01); G01P 2015/0871 (2013.01);
Abstract

A micromechanical structure including a substrate, a moveable seismic mass, a detection structure, and a main spring. The seismic mass is connected to the substrate using the main spring. A first direction and a second direction perpendicular thereto define a main extension plane of the substrate. The detection structure detects a deflection of the seismic mass and includes first electrodes mounted at the seismic mass and second electrodes mounted at the substrate. The first electrodes and second electrodes have a two-dimensional extension in the first and second directions. The micromechanical structure has a graduated stop structure including a first spring stop, a second spring stop, and a fixed stop.


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