The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Sep. 03, 2018
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventor:

Takashi Muramatsu, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/45 (2006.01); G01B 9/02 (2022.01); G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
G01J 3/45 (2013.01); G01B 9/02044 (2013.01); G01B 11/14 (2013.01);
Abstract

An interferometer movable mirror position measurement apparatus for determining a position of a movable mirror of an interferometer. The interferometer movable mirror position measurement apparatus including: a laser light source; a phase separation optical system configured to make first light and second light separately detected; a signal conversion unit configured to detect the first light and the second light in synchronization with a position of a movable mirror to generate a first sinusoidal wave signal and a second sinusoidal wave signal, respectively; a phase calculation unit configured to perform normalization and phase difference correction on each of the first sinusoidal wave signal and the second sinusoidal wave signal, and then calculate a phase of the first sinusoidal wave signal or the second sinusoidal wave signal at each time point; and a movable mirror position determination unit configured to determine a position of the movable mirror at a predetermined time point.


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