The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

Dec. 07, 2018
Applicant:

Murata Machinery, Ltd., Kyoto, JP;

Inventor:

Makoto Kobayashi, Ise, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B61B 3/02 (2006.01); B65G 1/04 (2006.01); H01L 21/677 (2006.01); B65G 47/61 (2006.01);
U.S. Cl.
CPC ...
B61B 3/02 (2013.01); B65G 1/04 (2013.01); H01L 21/677 (2013.01); B65G 47/61 (2013.01);
Abstract

A moving mechanism moves a swing suppression unit in a traveling direction between an advanced position contacting a FOUP and a retracted position away from the FOUP by a drive of a drive unit. A buffer mechanism that allows the swing suppression unit that has been moved to the advanced position by the drive of the drive unit to move to the traveling direction after stopping the drive of the drive unit. The buffer mechanism includes a first coupling portion and a rod-shaped portion coupled to the swing suppression unit to perform a movement of an operation amount in accordance with an amount of movement of the swing suppression unit to a second position direction, a first bias portion that biases the first coupling portion and the rod-shaped portion so that the swing suppression unit presses the FOUP, and a second bias portion that acts on the first coupling portion and the rod-shaped portion when the operation amount of the first coupling portion and the rod-shaped portion is greater than a predetermined amount and that biases the first coupling portion and the rod-shaped portion so that the swing suppression unit presses the FOUP.


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