The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2024

Filed:

May. 10, 2019
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventors:

Hiroyuki Okada, Kakogawa, JP;

Masaya Yoshida, Himeji, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/68 (2006.01); B25J 9/16 (2006.01); B25J 11/00 (2006.01); B25J 13/08 (2006.01); H01L 21/67 (2006.01); B25J 19/02 (2006.01);
U.S. Cl.
CPC ...
B25J 9/1692 (2013.01); B25J 13/089 (2013.01); B25J 19/021 (2013.01);
Abstract

A method of detecting a substrate hold hand optical axis deviation includes: acquiring a hand reference turning position at which an ideal optical axis extends in a horizontal first direction; performing a first search processing; performing a second search processing similar to the first search processing to a second target body; and detecting an optical axis inclination from the ideal optical axis based on a difference between the positions detected in the first search processing and the second search processing. A distance in the second direction from the turning axis to the first target body is equal to a distance in the second direction from the turning axis to the second target body. On the hand, an intersecting position between the optical axis and the first target body is different from an intersecting position between the optical axis and the second target body.


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