The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Nov. 01, 2021
Semes Co., Ltd., Cheonan-si, KR;
Eonseok Lee, Cheonan-si, KR;
Boramchan Sung, Asan-si, KR;
Semes Co., Ltd., Cheonan-si, KR;
Abstract
An apparatus for supplying chemical liquid may include a gantry, a chemical liquid supply member providing a chemical liquid onto a substrate, and a moving device supporting the chemical liquid supply member and moving along the gantry. The moving device may include a moving member, load supporting members and absorbing members. The moving member may support one side of the chemical liquid supply member and may run over the gantry. The moving member may cover an upper face, a first side and a second side of the gantry. The load supporting members may support a load applied to the moving member and the gantry while maintaining a substantially constant distance between the moving member and the gantry. The absorbing members may absorb an impulsive load or an impulsive force applied to the moving member and/or the gantry when the moving member deviates from a moving path provided by the gantry.