The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Nov. 06, 2021
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Dexin Kong, Redmond, WA (US);

Ekmini Anuja De Silva, Slingerlands, NY (US);

Ashim Dutta, Clifton Park, NY (US);

Daniel Schmidt, Niskayuna, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 70/00 (2023.01); H10B 63/00 (2023.01); H10N 70/20 (2023.01);
U.S. Cl.
CPC ...
H10N 70/841 (2023.02); H10B 63/80 (2023.02); H10N 70/063 (2023.02); H10N 70/24 (2023.02); H10N 70/826 (2023.02);
Abstract

A high-density resistive random-access memory array with self-aligned bottom electrode contact includes a plurality of electrically conductive structures embedded in an interconnect dielectric material layer, a bottom electrode selectively grown over, and electrically connected to, each of the electrically conductive structures with the bottom electrode above an electrically conductive structure being separated from the bottom electrode above another electrically conductive structure by a first dielectric filling layer, the bottom electrode having a semi-circular shape. The array further includes a resistive random-access memory pillar disposed above the bottom electrode.


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