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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11856855 B1

PDFFull Text
Date of Patent:
Dec. 26, 2023

Filed:

Aug. 20, 2020

Thermal sensor and manufacturing method thereof

Applicant:

Nuvoton Technology Corporation, Hsinchu, TW;

Inventors:

In-Shiang Chiu, Hsinchu, TW;

Kuang-Chu Chen, Hsinchu, TW;

Peng-Chan Hsiao, Hsinchu, TW;

Han-Ying Liu, Hsinchu, TW;

Assignee:

Nuvoton Technology Corporation, Hsinchu, TW;

Attorney:

JCIPRNET

Primary Examiner:

Yara B Green

Assistant Examiner:

Fakeha Sehar

Int. Cl.
CPC ...
H10N 10/01 (2023.01); H10N 10/17 (2023.01);
U.S. Cl.
CPC ...
H10N 10/01 (2023.02); H10N 10/17 (2023.02);
Abstract

Provided are a thermal sensor and a manufacturing method thereof. The thermal sensor includes a transistor and a thermal sensing device. The thermal sensing device is disposed in a recess in a substrate and electrically connected to the transistor. The thermal sensing device includes a first dielectric layer, a metal silicide reflective layer, a second dielectric layer, and a thermal absorbing layer. The first dielectric layer is disposed on sidewalls and a bottom of the recess. The metal silicide reflective layer is disposed on the first dielectric layer located on the bottom of the recess. The second dielectric layer is disposed at a top of the recess. The thermal absorbing layer is disposed on the second dielectric layer.

Find Patent Forward Citations

Chiu, In-Shiang. (2023). Thermal sensor and manufacturing method thereof (U.S. Patent No. 11856855). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11856855

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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