The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2023
Filed:
Dec. 03, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Hsui Yang, Santa Clara, CA (US);
Yao-Hung Yang, Santa Clara, CA (US);
Jeevan Shanbhag, Cupertino, CA (US);
Chien-Min Liao, San Jose, CA (US);
Earl Hunter, Lakeway, TX (US);
David Ganon, Raanana, IL;
Mariana Luigi, Los Gatos, CA (US);
Siamak Salimian, Los Altos, CA (US);
Tom K. Cho, Los Altos, CA (US);
Chun-Chung Chen, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 13/08 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05K 13/087 (2018.08); H01L 21/67276 (2013.01); H01L 21/67294 (2013.01);
Abstract
The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.