The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2023
Filed:
Sep. 15, 2020
Beijing Boe Sensor Technology Co., Ltd., Beijing, CN;
Boe Technology Group Co., Ltd., Beijing, CN;
Ying Wang, Beijing, CN;
Jie Wu, Beijing, CN;
Liang Li, Beijing, CN;
Cuiwei Tang, Beijing, CN;
Haocheng Jia, Beijing, CN;
Xue Cao, Beijing, CN;
Tienlun Ting, Beijing, CN;
Chuncheng Che, Beijing, CN;
Hao Liu, Beijing, CN;
Beijing BOE Sensor Technology Co., Ltd., Beijing, CN;
BOE Technology Group Co., Ltd., Beijing, CN;
Abstract
The present disclosure provides a MEMS phase shifter and a manufacturing method thereof. The MEMS phase shifter includes a first substrate having a first surface, a coplanar waveguide on the first surface of the first substrate and including a first conductive wire and two second conductive wires on two sides of the first conductive wire and insulated from the first conductive wire, and a plurality of capacitance bridges on a side of the coplanar waveguide away from the first substrate. The plurality of capacitance bridges are arranged at intervals and insulated from the first conductive wire and the second conductive wire, and each of the plurality of capacitance bridges intersects the first conductive wire. The first surface of the first substrate includes a first groove, and the first conductive wire is suspended above the first groove.