The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Oct. 18, 2019
Applicants:

Centre National DE LA Recherche Scientifique, Paris, FR;

Ecole Normale Superieure, Paris, FR;

Sorbonne Universite, Paris, FR;

Universite DE Paris, Paris, FR;

Inventors:

Matthieu Delbecq, Antony, FR;

Tino Cubaynes, Heidelberg, FR;

José Palomo, Argenteuil, FR;

Matthieu Dartiailh, New York, NY (US);

Takis Kontos, Paris, FR;

Matthieu Desjardins, Paris, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B82B 3/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02527 (2013.01); B82B 3/0004 (2013.01); B82B 3/0057 (2013.01); H01L 22/14 (2013.01);
Abstract

A method for depositing an object, including: —approaching, in an enclosure, a holder in the direction of a carrier substrate, then—transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10bar.


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