The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Sep. 13, 2021
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Tomonori Kimura, Tokyo, JP;

Rokuzo Hara, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01H 11/08 (2006.01); G01L 1/16 (2006.01); H10N 30/30 (2023.01);
U.S. Cl.
CPC ...
G01H 11/08 (2013.01); G01L 1/167 (2013.01); H10N 30/302 (2023.02);
Abstract

Disclosed is a vibration sensor including a piezoelectric substrate, a first electrode and a second electrode that are arranged on the piezoelectric substrate, an amplifier electrically connected between the first electrode and the second electrode, and a solid medium having a first surface part in contact with the piezoelectric substrate, and a second surface part disposed opposite to the first surface part and used for contact with a target substance, the solid medium having a sound speed lower than the phase speed of a plate wave in the piezoelectric substrate, in which an oscillation loop includes the piezoelectric substrate, the first electrode, the second electrode, the amplifier, and the solid medium, and a vibration of the target substance is detected as a result of variation in the loop length of the oscillation loop in response to the vibration of the target substance.


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