The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Aug. 29, 2019
Applicant:

Ilika Technologies Limited, Romsey, GB;

Inventors:

Gianfranco Aresta, Southampton, GB;

David Michael Laughman, Acton, MA (US);

Brian Elliott Hayden, Lyndhurst, GB;

Samuel Guerin, Southampton, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); C03C 3/064 (2006.01); C03C 4/14 (2006.01); C23C 14/00 (2006.01); H01M 4/136 (2010.01); H01M 4/1397 (2010.01);
U.S. Cl.
CPC ...
C23C 14/08 (2013.01); C03C 3/064 (2013.01); C03C 4/14 (2013.01); C23C 14/0021 (2013.01); H01M 4/136 (2013.01); H01M 4/1397 (2013.01); C03C 2204/00 (2013.01);
Abstract

The present invention provides a vapour deposition method for preparing an amorphous lithium borosilicate compound or doped lithium borosilicate compound, the method comprising: providing a vapour source of each component element of the compound, wherein the vapour sources comprise at least a source of lithium, a source of oxygen, a source of boron and a source of silicon, and, optionally, a source of at least one dopant element; providing a substrate at a temperature of less than about 180° C.; delivering a flow of said lithium, said oxygen, said boron and said silicon, and, optionally, said dopant element, wherein the rate of flow of said oxygen is at least about 8×10m/s; and co-depositing the component elements from the vapour sources onto the substrate wherein the component elements react on the substrate to form the amorphous compound.


Find Patent Forward Citations

Loading…