The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2023
Filed:
Oct. 07, 2022
Applicant:
Saint-gobain Ceramics & Plastics, Inc., Worcester, MA (US);
Inventors:
Lin Fu, Rancho Palos Verdes, CA (US);
Jason A. Sherlock, Anaheim, CA (US);
Long Huy Bui, Orange, CA (US);
Douglas E. Ward, Santa Ana, CA (US);
Assignee:
SAINT-GOBAIN CERAMICS & PLASTICS, INC., Worcester, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); C01B 35/12 (2006.01); C01F 7/02 (2022.01); C01G 25/02 (2006.01); C01G 45/12 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C01B 35/127 (2013.01); C01F 7/02 (2013.01); C01G 25/02 (2013.01); C01G 45/1207 (2013.01);
Abstract
A composition suitable for chemical mechanical polishing a substrate can comprise abrasive particles, a multi-valent metal borate, at least one oxidizer and a solvent. The composition can polish a substrate with a high material removal rate and a very smooth surface finish.