The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2023
Filed:
Dec. 13, 2019
Robert Bosch Gmbh, Stuttgart, DE;
Christoph Hermes, Kirchentellinsfurt, DE;
Hans Artmann, Boeblingen-Dagersheim, DE;
Heribert Weber, Nuertingen, DE;
Peter Schmollngruber, Aidlingen, DE;
Thomas Friedrich, Moessingen-Oeschingen, DE;
Tobias Joachim Menold, Weil der Stadt, DE;
Mawuli Ametowobla, Stuttgart, DE;
ROBERT BOSCH GMBH, Stuttgart, DE;
Abstract
A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.