The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2023

Filed:

Aug. 12, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Jeff Hudgens, San Francisco, CA (US);

Damon K. Cox, Jarrell, TX (US);

Rajkumar Thanu, Santa Clara, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/10 (2006.01); B25J 18/00 (2006.01); B25J 17/02 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); F16H 35/02 (2006.01); F16H 35/00 (2006.01);
U.S. Cl.
CPC ...
B25J 9/1045 (2013.01); B25J 17/0241 (2013.01); B25J 18/00 (2013.01); F16H 35/02 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01); F16H 2035/003 (2013.01);
Abstract

Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.


Find Patent Forward Citations

Loading…