The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Jul. 06, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Hyochul Kim, Yongin-si, KR;
Younggeun Roh, Seoul, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
Provided are a spectral filter, a method of manufacturing the same, and an image sensor and an electronic device each including the spectral filter. The spectral filter includes a plurality of first reflective layers provided spaced apart from each other, and a plurality of cavities provided between the plurality of first reflective layers. The cavities have different thicknesses according to a center wavelength. Each of the cavities includes a plurality of etch stop layers having a constant total thickness according to the center wavelength, and at least one dielectric layer having a total thickness which changes according to the center wavelength, wherein the etch stop layers include materials having etch selectivities different than that of the dielectric layer.