The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Jul. 01, 2020
Schott Glass Technologies (Suzhou) Co. Ltd., Jiangsu, CN;
Yanquan Shan, Suzhou, CN;
Guangjun Zhang, Shanghai, CN;
Pengxiang Qian, Shanghai, CN;
Thomas Wiegel, Alfeld, DE;
SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD., Jiangsu, CN;
Abstract
A diffractive optical element is provided that includes at least two layers with different etching speeds for dry etching process. The diffractive optical element has a substrate of glass and a microstructure layer arranged on the substrate. The ratio of dry etching speed in thickness direction of the substrate to that of the microstructure layer is no more than 1:2 so that the substrate functions as an etching stop layer. The ratio of dry etching speed in horizontal direction of the substrate is substantially equal to that of the microstructure layer. The composition of glass includes, but is not limited to, AlO3, alkaline material (MO) and alkaline earth material (MO), where the weight percentage of AlO+MO+MO>=5%.