The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Jun. 03, 2019
Nec Corporation, Tokyo, JP;
Hiroshi Imai, Tokyo, JP;
NEC CORPORATION, Tokyo, JP;
Abstract
The objective of the present invention is to detect defects in a structure accurately in a non-contact manner. An optical path length converting unit () is disposed between a specimen being inspected and an image capturing element () in such a way as to cover part of a field of view of the image capturing element (). An image analyzing unit () uses images captured by the image capturing element () to calculate amounts of displacement within the surface of the specimen, obtained using two fields of view of the image capturing element () not covered/covered by the optical path length converting unit (). An out-of-plane displacement calculating unit () calculates an out-of-plane displacement of the specimen on the basis of the calculated amounts of displacement.