The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2023
Filed:
Dec. 22, 2020
Applicants:
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Inventors:
Haruhiko Tan, Kobe, JP;
Hajime Nakahara, San Jose, CA (US);
Assignees:
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
Kawasaki Robotics (USA), INC., Wixom, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 11/00 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01); H01L 21/687 (2006.01); B25J 15/06 (2006.01); B25J 15/00 (2006.01);
U.S. Cl.
CPC ...
B25J 11/0095 (2013.01); B25J 9/163 (2013.01); B25J 9/1664 (2013.01); B25J 13/088 (2013.01); B25J 15/0014 (2013.01); B25J 15/0616 (2013.01); H01L 21/68714 (2013.01);
Abstract
A wafer jig according to one or more embodiments may be used for a robot having a hand and a state detector. The hand can transport a wafer. The state detector detects a state of a member holding the wafer at the hand or a state of a negative pressure adsorbing the wafer at the hand. The wafer jig includes an information output part. The information output part outputs information to a hand side via the state detector by changing a detection result of the state detector.