The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11844281 B1

Date of Patent:

Dec. 12, 2023

Filed:

Jan. 21, 2021

Piezoelectric device

Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Yutaka Kishimoto, Nagaokakyo, JP;

Shinsuke Ikeuchi, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Kyoto, JP;

Attorney:

Keating & Bennett, LLP

Primary Examiner:

Derek J Rosenau

Int. Cl.

CPC ...

H01L 41/053 (2006.01); H10N 30/30 (2023.01); H10N 30/85 (2023.01); H10N 30/87 (2023.01); H10N 30/20 (2023.01);

U.S. Cl.

CPC ...

H10N 30/308 (2023.02); H10N 30/2047 (2023.02); H10N 30/85 (2023.02); H10N 30/87 (2023.02);

Abstract

A piezoelectric device includes a base portion and a membrane portion. The membrane portion is indirectly supported by the base portion, and is located on the upper side relative to the base portion. The membrane portion includes a plurality of layers. The membrane portion does not overlap with the base portion, and includes a single crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The membrane portion is provided with a through-groove penetrating in the up-down direction. The through-groove includes a first step portion provided in the thickest layer among the plurality of layers defining the membrane portion. The width of the through-groove is narrower on a lower side than on an upper side with the first step portion as a boundary.

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