The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2023
Filed:
Mar. 29, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Leon Volfovski, Mountain View, CA (US);
Andreas Schmid, Meyriez, CH;
Denis Martin Koosau, Pleasanton, CA (US);
Nicholas Michael Kopec, Santa Clara, CA (US);
Steven Babayan, Los Altos, CA (US);
Douglas R. McAllister, San Ramon, CA (US);
Helder Lee, San Jose, CA (US);
Jeffrey Hudgens, San Francisco, CA (US);
Damon K. Cox, Jarrell, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A process kit ring adaptor includes one or more upper surfaces and one or more lower surfaces. The one or more upper surfaces are configured to support a process kit ring. The one or more lower surfaces are configured to interface with an end effector. The process kit ring adaptor supporting the process kit ring is configured to be transported on the end effector within a processing system.