The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2023
Filed:
Apr. 11, 2022
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Jong-hoon Park, Asan-si, KR;
Sukwon Jung, Sejong-si, KR;
Hyunwoo Joo, Seoul, KR;
Jaihyuk Choi, Hwaseong-si, KR;
Kyungjoo Min, Yongin-si, KR;
Wonwoong Park, Seoul, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-Si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/44 (2006.01); C23C 16/505 (2006.01); C23C 16/455 (2006.01); C23C 16/509 (2006.01); H10K 71/00 (2023.01); C23C 16/34 (2006.01); H10K 71/16 (2023.01);
U.S. Cl.
CPC ...
H01J 37/32082 (2013.01); C23C 16/4411 (2013.01); C23C 16/4412 (2013.01); C23C 16/45565 (2013.01); C23C 16/505 (2013.01); C23C 16/5096 (2013.01); H01J 37/3244 (2013.01); H01J 37/32091 (2013.01); H01J 37/32458 (2013.01); H01J 37/32467 (2013.01); H01J 37/32568 (2013.01); H01J 37/32577 (2013.01); H10K 71/00 (2023.02); C23C 16/345 (2013.01); H01J 2237/3321 (2013.01); H10K 71/164 (2023.02);
Abstract
A chemical vapor deposition apparatus includes a chamber, a susceptor supporting a substrate, a backing plate to which power is applied, a diffuser providing a deposition gas, and a first insulator. The first insulator may include a first portion covering a top surface of the backing plate, and a second portion assembled with the first portion and covering a sidewall of the backing plate.