The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2023
Filed:
Oct. 07, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Ashley Okada, San Jose, CA (US);
Ming Xu, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes receiving, for a first pipe, first pressure values corresponding to first valve positions of a first valve coupled to the first pipe. The method further includes receiving, for a second pipe routed in parallel with the first pipe, second pressure values corresponding to second valve positions of a second valve coupled to the second pipe. The method further includes generating a fluid conductance map based on the first valve positions, the first pressure values, the second valve positions, and the second pressure values. The method further includes causing, by a processing device based on a recipe and the fluid conductance map, the first valve to be in a first valve position and the second valve to be in a second valve position for a process of the recipe.