The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 12, 2023

Filed:

Nov. 09, 2017
Applicant:

The Board of Trustees of the University of Illinois, Urbana, IL (US);

Inventor:

Igor Paprotny, Urbana, IL (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 15/06 (2006.01); G01N 1/40 (2006.01); G01N 29/02 (2006.01); G01N 29/036 (2006.01); G01N 21/17 (2006.01); G01N 29/44 (2006.01); H01J 49/26 (2006.01); G01N 15/02 (2006.01); G01N 15/00 (2006.01); G01H 11/08 (2006.01); G01N 5/02 (2006.01);
U.S. Cl.
CPC ...
G01N 15/0606 (2013.01); G01N 1/4005 (2013.01); G01N 15/0255 (2013.01); G01N 21/17 (2013.01); G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 29/4436 (2013.01); H01J 49/26 (2013.01); G01H 11/08 (2013.01); G01N 5/02 (2013.01); G01N 2015/0046 (2013.01); G01N 2291/0215 (2013.01); G01N 2291/02408 (2013.01);
Abstract

Microfabricated PM sensors measure concentrations of particulate matter (PM) in air. Some sensors improve the accuracy of measurements by accounting for the effect of ambient conditions (e.g., temperature or humidity) on mass-sensitive elements employed to determine a mass of the PM in a stream of air. Some sensors improve the accuracy of measurements by controlling humidity in the stream of air measured by mass-sensitive elements. Some sensors employ a plurality of mass-sensitive elements to extend the useful life of the PM sensor. Some sensors employ one or more mass-sensitive elements and heating elements to cause deposition and allow measurement of different sizes of PM. Some sensors can measure mass concentration of coarse PM in addition to fine PM in a stream of air. Some sensors control the flow rate of a stream of air measured by mass-sensitive elements. Some sensors include features to mitigate electromagnetic interference or electromagnetic signal loss.


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