The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2023
Filed:
Jul. 16, 2021
Shih-yao Pan, Taoyuan, TW;
Chih-yao Ting, Taoyuan, TW;
Chia-hung Lin, Taoyuan, TW;
Hsin-yun Chang, Taoyuan, TW;
Shih-Yao Pan, Taoyuan, TW;
Chih-Yao Ting, Taoyuan, TW;
Chia-Hung Lin, Taoyuan, TW;
Hsin-Yun Chang, Taoyuan, TW;
Chroma ATE Inc., Taoyuan, TW;
Abstract
Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.