The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2023
Filed:
Apr. 12, 2022
Canon Kabushiki Kaisha, Tokyo, JP;
Tadashi Hattori, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus executes an imprint process for shaping an imprint material by using a mold. The apparatus includes a controller which obtains first height distribution information indicating a height distribution of a surface of a first substrate, and a measuring device which obtains second height distribution information indicating a height distribution of a surface of a second substrate. The controller controls the imprint process based on corrected height distribution information which is obtained by removing a first component that is an approximation function, of an order not more than a first predetermined order, for approximating the first height distribution information, from the first height distribution information, and a second component which is an approximation function, of an order not more than a second predetermined order, for approximating the second height distribution information.