The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 12, 2023

Filed:

Mar. 13, 2020
Applicant:

Nitto Denko Corporation, Ibaraki, JP;

Inventors:

Ryota Mita, Ibaraki, JP;

Tomoaki Ichikawa, Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 5/16 (2006.01); B23K 35/24 (2006.01); B23K 26/70 (2014.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
B23K 35/24 (2013.01); B23K 26/702 (2015.10); B32B 5/16 (2013.01); B32B 2260/025 (2013.01); B32B 2260/046 (2013.01); B32B 2264/105 (2013.01); B32B 2307/536 (2013.01); H01L 21/4814 (2013.01);
Abstract

To provide a sheet for sintering bonding and the same with a base material suited for lamination and integration and also suited for realizing satisfactory operational efficiency in a sintering process in a process of producing semiconductor devices that go through sintering bonding of semiconductor chips. A sheet for sintering bondingof the present invention comprises an electrically conductive metal containing sinterable particle and a binder component. In this sheet, the minimum load, reached during an unloading process in load-displacement measurement according to a nanoindentation method, is −100 to −30 μN. Alternatively, the ratio of the minimum load to a maximum load, reached during a load applying process in the above measurement, is −0.2 to −0.06. A sheet body X, a sheet for sintering bonding with a base material of the present invention, has a laminated structure comprising a base material B and the sheet


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