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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11839903 B1

PDFFull Text
Date of Patent:
Dec. 12, 2023

Filed:

Apr. 04, 2018

Vacuum pumping system

Applicant:

Edwards Limited, Burgess Hill, GB;

Inventors:

Christopher Mark Bailey, Burgess Hill, GB;

Michael Roger Czerniak, Burgess Hill, GB;

Assignee:

Edwards Limited, Burgess Hill, GB;

Attorneys:

Theodore M. Magee

Westman, Champlin & Koehler, P.A.

Primary Examiner:

Kevin R Barss

Int. Cl.
CPC ...
F04D 13/00 (2006.01); B08B 15/02 (2006.01); G03F 7/00 (2006.01); B01D 53/64 (2006.01); H01L 21/67 (2006.01); B01F 23/10 (2022.01); B01F 35/71 (2022.01); B01F 35/21 (2022.01); B01F 35/221 (2022.01); F04D 13/12 (2006.01);
U.S. Cl.
CPC ...
B08B 15/02 (2013.01); B01D 53/64 (2013.01); B01F 23/191 (2022.01); B01F 35/2111 (2022.01); B01F 35/2132 (2022.01); B01F 35/2211 (2022.01); B01F 35/718 (2022.01); F04D 13/12 (2013.01); G03F 7/70916 (2013.01); G03F 7/70933 (2013.01); H01L 21/67017 (2013.01); F04D 13/00 (2013.01);
Abstract

A vacuum pumping system which comprises a plurality of vacuum pumping arrangements for evacuating a flammable gas stream and exhausting the gas stream through an exhaust outlet. A housing houses the vacuum pumping arrangements and forms an air flow duct for an air flow for mixing with the exhaust gas stream output from the exhaust outlet in a mixing region in the housing. An airflow generator generates an air flow through the air flow duct to cause mixing of air with the flammable gas stream to a percentage of the flammable gas in the air flow lower than the lower flammability limit of the flammable gas. An airflow sensor senses the flow of air for determining if the air flow is sufficient to dilute the flammable gas to lower than said percentage.

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