The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2023

Filed:

Jan. 29, 2018
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;

Inventors:

Tetsuya Yoshida, Kakogawa, JP;

Ryosuke Kanamaru, Kakogawa, JP;

Shinya Kinoshita, Kobe, JP;

Takayuki Fukushima, Takarazuka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 15/00 (2006.01); B65G 49/07 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67712 (2013.01); B25J 15/0009 (2013.01); B65G 49/07 (2013.01); H01L 21/67718 (2013.01); H01L 21/68707 (2013.01);
Abstract

Substrate holding hand including a base plate spreading from base toward tip end sides, part of base plate located at base end side, fixed to hand tip portion, holding position at base plate, engaging claw at part of base plate located at tip end side, engaging claw configured to engage part of edge of substrate in vertical or inclined postures, part of edge located lower than center of substrate, moving portion at base end side of holding position and configured to move toward tip end side, and plurality of rotating bodies at the moving portion, being pressed by movement against edge of substrate located lower than holding position and engaged with claw, and plurality of rotating bodies pushing substrate upward holding position while rotating along edge of substrate.


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