The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Aug. 02, 2021
Canon Kabushiki Kaisha, Tokyo, JP;
Satoshi Iino, Saitama, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus that performs an imprint process of forming a pattern on a shot region of a substrate using a mold is provided. The apparatus comprises a mold holder for holding the mold, and a deformation mechanism for deforming a pattern region of the mold held by the mold holder. Based on a response property of the mold when the force is applied to the mold by the deformation mechanism, a setting load is applied to the mold by the deformation mechanism before the mold and the imprint material are brought into contact with each other, and the pattern region of the mold is deformed by the deformation mechanism, after the mold and the imprint material have been brought into contact with each other, so as to reduce an overlay error between the shot region and the pattern region.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile