The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Nov. 13, 2020
Applicant:
Trumpf Lasersystems for Semiconductor Manufacturing Gmbh, Ditzingen, DE;
Inventors:
Martin Lambert, Korb, DE;
Tolga Ergin, Bietigheim-Bissingen, DE;
Assignee:
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH, Ditzingen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/09 (2006.01); G02B 17/06 (2006.01); G02B 7/182 (2021.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
G02B 17/0673 (2013.01); G02B 7/1827 (2013.01); G02B 17/0621 (2013.01); G02B 27/09 (2013.01); H05G 2/008 (2013.01);
Abstract
A focusing device for focusing a laser beam in a target area. The focusing device includes a paraboloid mirror configured to widen the laser beam; an ellipsoid mirror or a hyperboloid mirror configured to focus the widened laser beam at a focal position within the target area; and a movement device. The movement device is configured to move the ellipsoid mirror or the hyperboloid mirror relative to the paraboloid mirror, or together with the paraboloid mirror, to change the focal position within the target area.