The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Oct. 06, 2021
Shimadzu Corporation, Kyoto, JP;
Koichi Shimizu, Kyoto, JP;
SHIMADZU CORPORATION, Kyoto, JP;
Abstract
A turbo-molecular pump comprises: a turbine pump portion having rotor blades and stator blades arranged in multiple stages in an axial direction; a drag pump portion provided on a downstream side of the turbine pump portion; a case housing the turbine pump portion; a base housing the drag pump portion; and a temperature adjustment unit provided between the case and the base. The temperature adjustment unit includes a temperature adjustment spacer forming a pump casing together with the case and the base and, the temperature adjustment unit includes a cooler, a heater, and a temperature detector which are provided at the temperature adjustment spacer.