The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Jul. 07, 2020
Infineon Technologies Ag, Neubiberg, DE;
Martin Seidl, Moosburg a.d. Isar, DE;
Alfons Dehe, Villingen Schwenningen, DE;
Daniel Fruechtl, Regensburg, DE;
Wolfgang Klein, Zorneding, DE;
Ulrich Krumbein, Rosenheim, DE;
Johann Strasser, Schierling, DE;
Matthias Vobl, Munich, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A MEMS pump includes a basis structure, a membrane structure opposing the basis structure and being deflectable parallel to a surface normal of the basis structure and includes a pump chamber between the basis structure and the membrane structure wherein a volume of the pump chamber is based on a position of the membrane structure with respect to the basis structure. The MEMS pump includes a passage for letting a fluid pass into the pump chamber or exit the pump chamber, wherein the passage is arranged in-plane with respect to the pump chamber. The MEMS pump includes a valve structure coupled to the passage for connecting, in a first state, the passage to a first outer volume and for connecting, in a second state, the passage to a second outer volume.