The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Jul. 09, 2021
Lpe S.p.a., Baranzate, IT;
LPE S.p.A., Baranzate, IT;
Abstract
The present invention relates to a heating method for a reactor () for epitaxial deposition; the reactor () comprises a susceptor () and an inductor (); the inductor () is adapted to heat the susceptor () by electromagnetic induction when it is electrically powered; the inductor () comprises a plurality of turns (-); during heating of the susceptor () from a first temperature to a second temperature, the position of one or more turns () of the inductor () with respect to the susceptor () and to the other turns of the inductor () is changed. The turns () are actuated by means of an appropriate actuation system ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile