The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Oct. 20, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Kenji Yoshida, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An imprint apparatus that performs an imprint process for bringing a protruding portion of a mold into contact with a composition on a substrate is provided. The apparatus comprises a first illuminator configured to emit light for curing the composition, a second illuminator including a scanner configured to scan beam-like light for curing the composition, and a controller configured to control exposure such that in a state where the composition and the protruding portion are in contact with each other, the light from the first illuminator is emitted to the composition at a position corresponding to a first region of the protruding portion, and control the scanner such that the light from the second illuminator is emitted to the composition at a position corresponding to a second region different from the first region of the protruding portion.