The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2023
Filed:
Feb. 23, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Charles N. Ditmore, Oakland, CA (US);
Richard M. Blank, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 11/00 (2006.01); B25J 18/04 (2006.01); B25J 19/00 (2006.01);
U.S. Cl.
CPC ...
B25J 11/0095 (2013.01); B25J 18/04 (2013.01); B25J 19/0079 (2013.01); B25J 19/0083 (2013.01); H01L 21/67766 (2013.01);
Abstract
A collar may be provided having an aperture through it through which the turret of a wafer handling robot may be extended or retracted. The collar may have one or more radial gas passages. Gas directed inwards towards the turret from the radial passage(s) may turn downward when it strikes the turret. A bellows may be optionally affixed to the bottom of the turret and to the bottom of the base such that the volume of the base occupied by the turret and the bellows remains generally fixed regardless of the degree to which the turret is extended from the base.