The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 28, 2023

Filed:

Mar. 24, 2021
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

Christian Lau, Boston, MA (US);

Max Shulaker, Weston, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H10K 10/88 (2023.01); H10K 10/84 (2023.01); H10K 10/46 (2023.01); H10K 19/10 (2023.01); H10K 85/20 (2023.01); H10K 102/00 (2023.01);
U.S. Cl.
CPC ...
H10K 10/88 (2023.02); H10K 10/462 (2023.02); H10K 10/84 (2023.02); H10K 19/10 (2023.02); H10K 85/221 (2023.02); H10K 2102/00 (2023.02);
Abstract

A carbon nanotube field effect transistor (CNFET), that has a channel formed of carbon nanotubes (CNTs), includes a layered deposit of a nonstoichiometric doping oxide (NDO), such as HfO, where the concentration of the NDO varies through the thickness of the layer(s). An n-type metal-oxide semiconductor (NMOS) CNFET made in this manner can achieve similar ON-current, OFF-current, and/or threshold voltage magnitudes to a corresponding p-type metal-oxide semiconductor (PMOS) CNFET. Such an NMOS and PMOS can be used to achieve a symmetric complementary metal-oxide semiconductor (CMOS) CNFET design.


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