The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Apr. 18, 2021
Ultimems, Inc., New Taipei, TW;
ULTIMEMS, INC., New Taipei, TW;
Abstract
A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.