The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2023
Filed:
Apr. 11, 2022
Applicant:
Db Hitek Co., Ltd., Bucheon-si, KR;
Inventors:
Seung Hyun Eom, Seoul, KR;
Jin Hyo Jung, Suwon-si, KR;
Hae Taek Kim, Bucheon-si, KR;
Ja Geon Koo, Eumseong-gun, KR;
Ki Won Lim, Suwon-si, KR;
Hyun Joong Lee, Daejeon, KR;
Sang Yong Lee, Chungju-si, KR;
Assignee:
DB HiTek, Co., Ltd., Bucheon-si, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/49 (2006.01); H01L 29/06 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4991 (2013.01); H01L 29/0653 (2013.01); H01L 23/528 (2013.01);
Abstract
Disclosed is an RF switch device and, more particularly, an RF switch device having an air gap over a gate electrode and a metal interconnect at a position higher than the air gap and that at least partially overlap the air gap in the vertical direction, thereby preventing exposure of an upper portion of the air gap in subsequent processing.