Method for predicting occurrence of tool processing event and virtual metrology application and computer program product thereof

Abstract

Embodiments of the present disclosure provide a method for predicting an occurrence of a tool processing event, thereby determining whether to activate a virtual metrology. In a model-building stage, plural sets of model-building data are used to create at least one classification model in accordance with at least one classification algorithm, in which each classification model includes plural decision trees. Then, probabilities of the decision trees are used to create at least one reliance index model, and the sets of model-building data are used to create at least one similarity index model in accordance with a statistical distance algorithm. In a conjecture stage, a set of processing data of a workpiece is inputted into each classification model, each reliance index model and each similarity index model to determine whether to activate (start) virtual metrology.