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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11828952 B1

PDFFull Text
Date of Patent:
Nov. 28, 2023

Filed:

Mar. 31, 2021

Light source and extreme ultraviolet light source system using the same

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Dohyung Kim, Hwaseong-si, KR;

Seongchul Hong, Suwon-si, KR;

Kyungsik Kang, Bucheon-si, KR;

Kyungbin Park, Seoul, KR;

Motoshi Sakai, Suwon-si, KR;

Seungkoo Lee, Seoul, KR;

Jungchul Lee, Hwaseong-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;

Attorney:

Muir Patent Law, PLLC

Primary Examiner:

Wyatt A Stoffa

Assistant Examiner:

Mitchell T Oestreich

Int. Cl.
CPC ...
G02B 27/10 (2006.01); H05G 2/00 (2006.01); G02B 27/14 (2006.01); H01S 3/00 (2006.01); H01S 3/23 (2006.01); G03F 7/00 (2006.01); H01S 3/223 (2006.01);
U.S. Cl.
CPC ...
G02B 27/1073 (2013.01); G02B 27/106 (2013.01); G02B 27/108 (2013.01); G02B 27/141 (2013.01); G03F 7/70191 (2013.01); H01S 3/0071 (2013.01); H01S 3/2308 (2013.01); H01S 3/2383 (2013.01); H05G 2/008 (2013.01); H01S 3/2232 (2013.01);
Abstract

A light source capable of operating third and fourth reflection mirrors included in a beam splitting device in conjunction with movements of first and second reflection mirrors included in a beam transfer device and an optical assembly, respectively. The third and fourth reflection mirrors are disposed on optical paths of a pre-pulse and a main pulse emitted from first and second pulse generators, respectively. The light source operates the third and fourth reflection mirrors to offset an excessive compensation of the main pulse caused in a process of compensating for an optical path error of the pre-pulse. The light source may be included in an extreme ultraviolet light source system.

Find Patent Forward Citations

Kim, Dohyung. (2023). Light source and extreme ultraviolet light source system using the same (U.S. Patent No. 11828952). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11828952

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